Impact of cobalt silicidation on the low-frequency noise behavior of shallow P-N junctions

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Authors

Lukyanchikova, N. B.; Petrichuk, M. V.; Garbar, N.; Simoen, Eddy; Poyai, Amporn; Claeys, Cor

Issue

8

Journal

IEEE Electron Device Letters

Volume

21

Title

Impact of cobalt silicidation on the low-frequency noise behavior of shallow P-N junctions

Publication type

Journal article

Embargo date

9999-12-31

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