Integration of electroless and electrolytic Cu and IC back end of line technologies

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Authors
Maex, Karen; Brongersma, Sywert; Lantasov, Yuri; Richard, Emmanuel; Palmans, Roger; Vervoort, Iwan
Conference
Electrochemical Technology Applications in Electronics III
Title
Integration of electroless and electrolytic Cu and IC back end of line technologies
Publication type
Proceedings paper
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