Publication:

Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3050810

Simple item page Full metadata Statistics

Author(s)

Bogdanowicz, Janusz

;

Mingardi, Andrea

;

Brissonneau, Vincent

;

;

Shimura, Yosuke

;

;

Puttarame Gowda, Pallavi

;

;

Horiguchi, Naoto

;

Biesemans, Serge

;

;

;

;

;

Leray, Philippe

;

Charley, Anne-Laure

Journal

Proceedings of SPIE

Statistics

49 since deposited on 2025-07-28

3last month

Acq. date: 2026-04-08