Publication:

e-beam Metrology for High-NA: Revisiting the imec Protocol

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3052366
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Author(s)

Lorusso, Gian Francesco
;
Moussa, Alain  
;
Habashieh, Sahel
;
Van Den Heuvel, Dieter
;
Vangoidsenhoven, Diziana
;
Gupta, Mihir  
;
Suh, Hyo Seon  
;
Chen, Ying-Lin  
;
De Simone, Danilo  
;
Mack, Chris
;
Sun, Wei
;
Sugie, Masaki
;
Foubert, Philippe  
;
Isawa, Miki
;
Charley, Anne-Laure  

Journal

Proceedings of SPIE

Abstract

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107 since deposited on 2025-07-28
37last month
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Acq. date: 2026-10-07

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