Publication:

EUV DRAM Patterning Historic Overview and Future Assumption

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3052340

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Author(s)

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Miyaguchi, Kenichi

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Niroomand, Ardavan

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Verstraete, Lander

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Gillijns, Werner

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Das, Shubhankar

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Sherazi, Yasser

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Trivkovic, Darko

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Vanelderen, Pieter

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Kim, Ryan Ryoung Han

Metrics

38 since deposited on 2025-07-31

3last month

Acq. date: 2026-01-10