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EUV DRAM Patterning Historic Overview and Future Assumption
Publication:
EUV DRAM Patterning Historic Overview and Future Assumption
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Date
2025
Proceedings Paper
https://doi.org/10.1117/12.3052340
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lee, Jeonghoon
;
Hwang, Soobin
;
Van Tuong Pham
;
Miyaguchi, Kenichi
;
Niroomand, Ardavan
;
Verstraete, Lander
;
Yang, Kiho
;
Gillijns, Werner
;
Das, Shubhankar
;
Blanco, Victor
;
Halder, Sandip
;
Suh, Hyo Seon
;
Sherazi, Yasser
;
Trivkovic, Darko
;
Vanelderen, Pieter
;
Lee, Inhee
;
Ronse, Kurt
;
Kim, Ryan Ryoung Han
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38
since deposited on 2025-07-31
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Acq. date: 2026-01-10
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Views
38
since deposited on 2025-07-31
3
last month
Acq. date: 2026-01-10
Citations