Optimizing EUV OPC Runtime and Pattern Fidelity in DRAM Manufacturing Using Memory OPC Flow

De Gong, Shu; Chen, Sheng Tse; Liao, Chun Cheng; Huang, Teng Yen; Meng, Renyang; Yang, Kiho; Gillijns, Werner; Lin, Hsin-jung; Ma, Shou-yuan; Tsai, JenHsiang; Lin, Ling Chieh; Chou, Ryan; Burbine, Andrew; Pearson, Alex; Zhang, Xima

doi:10.1117/12.3051007

Publication:

Optimizing EUV OPC Runtime and Pattern Fidelity in DRAM Manufacturing Using Memory OPC Flow

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051007

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

;

;

Journal

Proceedings of SPIE

Statistics

47 since deposited on 2025-07-31

Acq. date: 2026-05-16

Optimizing EUV OPC Runtime and Pattern Fidelity in DRAM Manufacturing Using Memory OPC Flow

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations