Publication:

Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3050453

Simple item page Full metadata Statistics

Author(s)

;

Carballo, V. M. Blanco

;

;

;

;

;

;

;

Rutigliani, V. D.

;

;

;

;

;

;

;

;

;

;

;

;

Metrics

42 since deposited on 2025-07-31

Acq. date: 2026-01-10