Publication:

Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3036470
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Author(s)

Trivkovic, Darko  
;
Shi, Xuelong  
;
Tsai, Yi-Pei
;
Chang, Chieh-Miao
;
Wang, Jane  
;
Malacara, Victoria  
;
Baskaran, Balakumar  
;
Drissi, Youssef  
;
Bekaert, Joost  
;
Miyaguchi, Kenichi  

Journal

Proceedings of SPIE

Abstract

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