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Conference contributions
Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification
Publication:
Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3036470
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Trivkovic, Darko
;
Shi, Xuelong
;
Tsai, Yi-Pei
;
Chang, Chieh-Miao
;
Wang, Jane
;
Malacara, Victoria
;
Baskaran, Balakumar
;
Drissi, Youssef
;
Bekaert, Joost
;
Miyaguchi, Kenichi
Journal
Proceedings of SPIE
Abstract
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Acq. date: 2026-01-09
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Views
20
since deposited on 2025-08-29
4
last month
1
last week
Acq. date: 2026-01-09
Citations