Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layers

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Authors
Krishnasamy, Rajendran; Schoenmaker, Wim
Conference
Proceedings of the 7th International Workshop on Computational Electronics - IWCE
Title
Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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