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Silicide and shallow trench isolation line width dependent stress induced junction leakage
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Authors
Steegen, An
;
Lauwers, Anne
;
de Potter de ten Broeck, Muriel
;
Badenes, Gonçal
;
Rooyackers, Rita
;
Maex, Karen
Conference
Symposium on VLSI Technology. Digest of Technical Papers
Title
Silicide and shallow trench isolation line width dependent stress induced junction leakage
Publication type
Proceedings paper
Embargo date
9999-12-31
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