Evaluating probes for "electrical" atomic force microscopy

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Authors

Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Vandervorst, Wilfried; Hellemans, L.; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O.

Issue

1

Journal

J. Vacuum Science and Technology B

Volume

B18

Title

Evaluating probes for "electrical" atomic force microscopy

Publication type

Journal article

Embargo date

9999-12-31

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