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Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
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1959 since deposited on 2021-10-14
1last month
Acq. date: 2026-03-17
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Statistics
Views
1959 since deposited on 2021-10-14
1last month
Acq. date: 2026-03-17
Citations