Publication:
Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
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1958 since deposited on 2021-10-14
2last month
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Acq. date: 2025-12-10
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1958 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2025-12-10
Citations