Authors
Besling, Wim;
Young, Edward;
Conard, Thierry;
Zhao, Chao;
Vandervorst, Wilfried;
Caymax, Matty;
De Gendt, Stefan;
Heyns, Marc;
Maes, Jos;
Tuominen, Marko;
Haukka, S.
Conference
Symposium Q of the E-MRS Spring Meeting 2001: High-k Gate Dielectrics; June 5-8, 2001; Strasbourg, France.
Title
Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Publication type
Oral presentation