Gate stack preparation with high-k materials in a cluster tool

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Authors
De Gendt, Stefan; Heyns, Marc; Conard, Thierry; Nohira, Hiroshi; Richard, Olivier; Vandervorst, Wilfried; Caymax, Matty; Maes, Jos; Tuominen, Marko; Bajolet, Philippe
Conference
Proceedings of the IEEE International Symposium on Semiconductor Manufacturing - ISSM
Title
Gate stack preparation with high-k materials in a cluster tool
Publication type
Proceedings paper
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