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Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM
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Authors
De Gryse, O.
;
Clauws, P.
;
Lebedev, O.
;
Van Landuyt, J.
;
Vanhellemont, Jan
;
Claeys, C.
;
Simoen, Eddy
Journal
Physica B
Volume
308
Title
Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM
Publication type
Journal article
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