Publication:
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGe
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1878 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-02-24
Citations
Statistics
Views
1878 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-02-24
Citations