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A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
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Authors
Lanckmans, Filip
;
Gray, William
;
Brijs, Bert
;
Maex, Karen
Issue
1_4
Journal
Microelectronic Engineering
Volume
55
Title
A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
Publication type
Journal article
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