Authors

Lauwers, A.; de Potter de ten Broeck, Muriel; Lindsay, Richard; Steegen, An; Roelandts, Nico; Lossen, F.; Vrancken, Christa; Maex, Karen

Conference

Symposium K of the MRS Spring Meeting: Gate Stack and Silicide Issues in Si Processing II; 16-20 April 2001; San Francisco, CA,

Title

Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologies

Publication type

Oral presentation