Authors

Carpi, Enio; Van Hove, Marleen; Alay, Josep Lluis; Van Rossum, Marc

Issue

3

Journal

J. Vac. Sci. Technol. B

Volume

13

Title

Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by the experimental design method

Publication type

Journal article

Embargo date

9999-12-31