Authors

Peto, G.; Molnar, G.; Kotai, E.; Dezsi, I.; Karlsteen, M.; Södervall, U.; Willander, M.; Caymax, Matty; Loo, Roger

Conference

Symposium D of the E-MRS Spring Meeting 2001: 2nd International Conference on Silicon Epitaxy and Heterostructures; June 5-8, 20

Title

Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer

Publication type

Oral presentation