Publication:
Electron spin resonance analysis of interfacial Si dangling bond type defects in stack of ultrathin SiO2, Al2O3, and ZrO2 layers on (100)Si
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2142 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
Citations
Metrics
Views
2142 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
Citations