Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence
Publication:
Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence
Copy permalink
Date
2001
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Arnauts, Sophia
;
Van Doorne, Patrick
;
Kenis, Karine
;
Onsia, Bart
;
Verstraeten, K.
;
Schaekers, Marc
;
Van Hoeymissen, Jan
;
Heyns, Marc
Journal
Spectrochimica Acta B
Abstract
Description
Metrics
Views
1943
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1943
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-10
Citations