Authors

Vereecke, Guy; Arnauts, Sophia; Van Doorne, Patrick; Kenis, Karine; Onsia, Bart; Verstraeten, K.; Schaekers, Marc; Van Hoeymissen, Jan; Heyns, Marc

Journal

Spectrochimica Acta B

Volume

56

Title

Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence

Publication type

Journal article