Publication:

Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors

Date

2025-01-01
Proceedings Paper
https://doi.org/10.1109/IRPS48204.2025.10982827
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Author(s)

Fohn, Corinna  
;
Zharfan, F.
;
Chery, Emmanuel  
;
Croes, Kristof  
;
Stucchi, Michele  
;
Afanasiev, Valeri  

Journal

2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS

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14 since deposited on 2025-11-27
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Acq. date: 2026-01-11

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14 since deposited on 2025-11-27
1last month
Acq. date: 2026-01-11

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