Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Kwon, DaeSeon; Bizindavyi, Jasper; Parida, Pradyumna Kumar; De, Gourab; Kim, Hyun-Cheol; Richard, Olivier; Favia, Paola; Belmonte, Attilio; Delabie, Annelies; Nyns, Laura; Kar, Gouri Sankar; Van Houdt, Jan; Popovici, Mihaela Ioana

doi:10.1016/j.apsusc.2025.164786

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Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Date

2026

Journal article

https://doi.org/10.1016/j.apsusc.2025.164786

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Kwon, DaeSeon

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Bizindavyi, Jasper

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Parida, Pradyumna Kumar

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Popovici, Mihaela Ioana

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APPLIED SURFACE SCIENCE

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14 since deposited on 2025-12-19

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Acq. date: 2026-01-09

Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

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