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Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Publication:
Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Richard, Olivier
;
Bender, Hugo
;
Houssa, Michel
;
Carter, Richard
;
De Gendt, Stefan
;
Heyns, Marc
;
Young, Edward
;
Tsai, Wilman
;
Roebben, G.
;
Van der Biest, O.
;
Haukka, S.
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2213
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2213
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations