Resolving In Situ Exposure Dynamics in a Chemically Amplified EUV Photoresist Using Table-Top EUV Photoemission Spectroscopy

Singh, Dhirendra; Galleni, Laura; Sajjadian, Faegheh; Pollentier, Ivan; Holzmeier, Fabian; Pourtois, Geoffrey; De Gendt, Stefan; van Setten, Michiel; Conard, Thierry; Petersen, John; van der Heide, Paul; Dorney, Kevin

doi:10.1021/acsami.5c09589

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Resolving In Situ Exposure Dynamics in a Chemically Amplified EUV Photoresist Using Table-Top EUV Photoemission Spectroscopy

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2025

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https://doi.org/10.1021/acsami.5c09589

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ACS APPLIED MATERIALS & INTERFACES

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Resolving In Situ Exposure Dynamics in a Chemically Amplified EUV Photoresist Using Table-Top EUV Photoemission Spectroscopy

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