Browsing Presentations by imec author "00a2d4a20f9ae70a7162880285146099a35e35ac"
Now showing items 1-7 of 7
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Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
Scheerder, Jeroen; Fleischmann, Claudia; Dialameh, Masoud; Melkonyan, Davit; Morris, Richard; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Buried interface and buried film analysis using lab-scale Haxpes instruments
Conard, Thierry; Zborowski, Charlotte; Vanleenhove, Anja; Hoflijk, Ilse; Vaesen, Inge; van der Heide, Paul (2021) -
Correlative Analysis in The Semiconductor Industry
Larson, D; Prosa, T; Martin, I; Merkulov, A; Robbes, A; Dulac, O; Bernier, N; Delaye, V; Franquet, Alexis; van der Heide, Paul; Spampinato, Valentina; Vandervorst, Wilfried (2019) -
Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography
Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22) -
Real 3D depth profiling of heterogeneous microelectronic structures using a combined ToF-SIMS/in-situ SPM tool
Franquet, Alexis; Spampinato, Valentina; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Spampinato, Valentina; Franquet, Alexis; De Simone, Danilo; Pollentier, Ivan; Vandenbroeck, Nadia; Pirkl, Alexander; Kayser, Sven; Vandervorst, Wilfried; van der Heide, Paul (2019)