Browsing Presentations by imec author "4b738d90b98262c38789b14ec0b31e32af502915"

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Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2

Li, H.; Heyvaert, Ilse; Jin, S.; Lanckmans, Filip; Bender, Hugo; Maex, Karen; Froyen, L. (1998)
Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations

Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo (1999)