Browsing Presentations by author "O'Neill, A.G."

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In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects

Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G. (2009)
Strained Si/SiGe MOS technology

Olsen, S.; Yan, L.; Agaiby, R.; Escobedo-Cousin, E.; O'Neill, A.G.; Hellstrom, P.-E.; Ostling, M.; Lyutovich, L.; Kasper, E.; Claeys, Cor; Parker, E.H.C. (2007)