Browsing Presentations by author "Abell, Thomas"
Now showing items 1-4 of 4
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Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Iacopi, Francesca; Brongersma, Sywert; Maex, Karen; Abell, Thomas (2002) -
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Abell, Thomas; Shamiryan, Denis; Patz, Matthias; Maex, Karen (2003) -
Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Iacopi, Francesca; Waldfried, Carlo; Abell, Thomas; Guyer, Eric; Eyckens, Brenda; Travaly, Youssef; Sajavaara, Timo; Gage, David M.; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005) -
UV-assisted curing: an effective technique for toughening of low-k organosilicate films
Iacopi, Francesca; Waldfried, Carlo; Houthoofd, Kristof; Guyer, Eric; Gage, David; Carlotti, Giovanni; Travaly, Youssef; Abell, Thomas; Escorcia, Orlando; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005)