Browsing Presentations by imec author "84020c9cf73b22a087f5f8f0178ef8c274e35838"
Now showing items 1-11 of 11
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Advanced optical lithography: double patterning options for 32 and 22nm node
Vandeweyer, Tom; Maenhoudt, Mireille; Vangoidsenhoven, Diziana; Gronheid, Roel; Versluijs, Janko; Miller, Andy; Bekaert, Joost; Truffert, Vincent; Wiaux, Vincent (2009) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Chan, BT; Gronheid, Roel; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014) -
Critical pattern behavior at nanometer scale vicinity of black border
Kovalevich, Tatiana; Bekaert, Joost; Wiaux, Vincent; Liddle, Jack; Davydova, Natalia; Tien, Ming-Chun (2019) -
Design method for the integration of DSA via patterning in sub-7 nm circuits
Karageorgos, Ioannis; Ryckaert, Julien; Croes, Kris; Tung, C. Maryann; Wong, H. -S. Philip; Karageorgos, Evangelos; Gronheid, Roel; Bekaert, Joost; Vandenberghe, Geert; Stucchi, Michele; Dehaene, Wim (2016) -
Extreme scaling of optical lithography: overview of process integration issues
Ronse, Kurt; Wiaux, Vincent; Verhaegen, Staf; Van Look, Lieve; Bekaert, Joost; Laidler, David; Cheng, Shaunee; Maenhoudt, Mireille; Vandenberghe, Geert; Dusa, Mircea (2009) -
Implementation of surface energy modification in grapho-epitaxy directed self-assembly for hole multiplication
Doise, Jan; Gronheid, Roel; Bekaert, Joost; Chan, BT; Cao, Yi; Guanyang, Lin (2015) -
Influence of surface energy modification in grapho-epitaxy DSA
Doise, Jan; Mailfert, Julien; Bekaert, Joost; Chan, BT; Lin, Guanyang; Gronheid, Roel (2015) -
Multiple patterning: a path towards sub-20nm hp
Vandenberghe, Geert; Wong, Patrick; Vandenbroeck, Nadia; Bekaert, Joost; Laenens, Bart; De Bisschop, Peter; Versluijs, Janko; Wiaux, Vincent (2010) -
N7 Logic via patterning using templated DSA - implementation aspects
Bekaert, Joost; Doise, Jan; Chan, BT; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Her, YoungJun; Cao, Yi (2015) -
Towards electrical verification of contact holes obtained with DSA of BCP
Rincon Delgadillo, Paulina; Bekaert, Joost; Vandenbroeck, Nadia; Gronheid, Roel; Chan, BT; van der Veen, Marleen; Vandersmissen, Kevin; Boemmels, Juergen; Luong, Vinh (2015)