Browsing Presentations by imec author "8c38dd5e192a931bf45f91c2074997a23f8a79b1"
Now showing items 1-6 of 6
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E-TEST validation of EPE budget and metrology
De Poortere, Etienne; Schelcher, Guillaume; Kissoon, Nicola; Paolillo, Sara; Tabery, Cyrus; Halder, Sandip; Leray, Philippe; Mulkens, Jan; McManus, Moyra (2020) -
EUV lithography qualification: Comparison of alternative wafer inspection methodologies and sensitivities
Halder, Sandip; Leray, Philippe (2018) -
Minimizing EUV edge placement error by fast high resolution SEM
Halder, Sandip; Leray, Philippe (2018) -
Particle removal efficiency and damage analysis of patterned wafers in different solvents after megasonic cleaning
Halder, Sandip; Bearda, Twan; Kenis, Karine; Janssens, Tom; Le, Quoc Toan; Wostyn, Kurt; Leunissen, Peter; Mertens, Paul (2008) -
The influence of standing waves on cleaning with a megasonic nozzle
Janssens, Tom; Doumen, Geert; Halder, Sandip; Wostyn, Kurt; Mertens, Paul; Straka, Joachim (2008) -
Using machine learning algorithms on review sem images to understand stochastic behaviour of EUV based patterning for n7 and smaller nodes
Halder, Sandip; Cerbu, Dorin; Leray, Philippe (2018)