Browsing Presentations by imec author "ca30497f34ffb9dbb8aeb60a71a99f1dba689ded"
Now showing items 1-7 of 7
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Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher; Wu, Hengpeng; Cao, Yi; Lin, Guanyang; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2012) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Nafus, Kathleen; Somervell, Mark; Cao, Yi; Lin, Guanyang (2012) -
EUV reolution-LWR-sensitivity performance tradeoffs for a polymer bound PAG resist
Gronheid, Roel; Vaglio Pret, Alessandro; Rathsack, Benjamin; Hooge, Joshua; Scheer, Steven; Nafus, Kathleen; Shite, Hideo; Kitano, Junichi (2010) -
Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen; Cao, Yi; Lin, Guanyang (2012) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen (2012) -
Process evaluation and optimization for EUV manufacturing
Foubert, Philippe; Nafus, Kathleen; Shite, Hideo; Goethals, Mieke; Matsunaga, Koichi; Hermans, Jan; Hendrickx, Eric (2012)