Browsing Presentations by author "Lagrange, Sébastien"
Now showing items 1-2 of 2
-
Roles of additive during filling process of damascene structures with electrochemical deposited copper
Richard, Emmanuel; Vervoort, Iwan; Brongersma, Sywert; Beyer, Gerald; Bender, Hugo; Palmans, Roger; Lagrange, Sébastien; Maex, Karen (1999) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (1999)