Browsing Presentations by imec author "d2daf255a83330f4fad5d4978f2d555aded7f24b"
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Advanced germanium devices for optical interconnects
Srinivasan, Ashwyn; Porret, Clément; Shimura, Yosuke; Vissers, Ewoud; Geiregat, Pieter; Loo, Roger; Pantouvaki, Marianna; Van Campenhout, Joris; Van Thourhout, Dries (2018) -
Beyond silicon CMOS photonics: a technology for future short distance system interconnects
Pantouvaki, Marianna; Verheyen, Peter; Lepage, Guy; De Heyn, Peter; De Coster, Jeroen; Rakowski, Michal; Snyder, Brad; Chen, Hongtao; Van Campenhout, Joris; Absil, Philippe (2015) -
Epitaxial III-V/Si devices for silicon photonics
Van Thourhout, Dries; Shi, Yuting; Tian, Bin; Wang, Zhechao; Pantouvaki, Marianna; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Van Campenhout, Joris (2017) -
Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch
Vereecke, Bart; Pantouvaki, Marianna; Beyer, Gerald; Tokei, Zsolt (2010) -
III/V Nano-ridge engineering for device integration on 300 mm silicon
Kunert, Bernardette; Colucci, Davide; Baryshnikova, Marina; Mols, Yves; Alcotte, Reynald; Van Thourhout, Dries; Ozdemir, Cenk Ibrahim; De Koninck, Yannick; Kuznetsova, Nadezda; Yudistira, Didit; Pantouvaki, Marianna; Van Campenhout, Joris; Vais, Abhitosh; Yadav, Sachin; Sibaja-Hernandez, Arturo; Parvais, Bertrand; Collaert, Nadine; Langer, Robert (2021) -
In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss
Kim, Tae-Gon; Verheyen, Peter; De Heyn, Peter; Vandeweyer, Tom; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris; Jo, Ahjin; Cho, Sangjoon; Park, Sang-il (2017) -
In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects
Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G. (2009) -
Integration of an organic ultra low-k (k=2.2) material
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ferchichi, Abdelkarim; Ono, Y.; Nakajima, M.; Nakatani, K.; Struyf, Herbert; Beyer, Gerald; Baklanov, Mikhaïl (2009) -
Monolithic/heterogeneous integration of III-V lasers on Si
Wang, Zhechao; Tian, Bin; Pantouvaki, Marianna; Merckling, Clement; Van Campenhout, Joris; Morthier, Geert; Roelkens, Gunther; Van Thourhout, Dries (2017) -
Novel devices for low-power silicon-photonics-based optical links
Absil, Philippe; Pantouvaki, Marianna; Hu, Yingtao; Verheyen, Peter; De Heyn, Peter; Chen, Hongtao; Agarwal, Saurabh; Lepage, Guy; De Coster, Jeroen; Rakowski, Michal; Van Thourhout, Dries; Roelkens, Gunther; Baets, Roel; Van Campenhout, Joris (2015) -
Plasma sealing of advanced organic low-k material
Smirnov, Evgeny; Pantouvaki, Marianna; Huffman, Craig; Vanstreels, Kris; Baklanov, Mikhaïl (2011)