Browsing Presentations by imec author "ffa6b56a8cf126ab49587f774ffc806dd452bad6"
Now showing items 1-3 of 3
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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt (2022-11-10) -
Fin bending in dimensional scaling
Zhang, Liping; Hellin, David; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Lazzarino, Frederic; Morin, Pierre; Wang, Shouhua; Hopf, Toby; Kenis, Karine; Lorant, Christophe; Sebaai, Farid; Batuk, Dmitry; Briggs, Basoene; Mertens, Hans; Demuynck, Steven (2020) -
Plasma etch challenges and processing optimization in spin logic device fabrication
Canvel, Yann; Souriau, Laurent; Wan, Danny; Trovato, Anna; Thiam, Arame; Tsvetanova, Diana; Carpenter, Robert; Raymenants, Eline; Asselberghs, Inge; Lazzarino, Frederic; Couet, Sebastien; Kar, Gouri Sankar; Nguyen, Van Dai (2022-11-08)