Charge trapping, mobility degradation and reliability of high-e gate stacks

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Authors
Cartier, Eduard; Kerber, Andreas; Pantisano, Luigi; Carter, Richard; Kauerauf, Thomas; Degraeve, Robin
Conference
33rd IEEE Semiconductor Interface Specialists Conference - SISC
Title
Charge trapping, mobility degradation and reliability of high-e gate stacks
Publication type
Oral presentation
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