Publication:
Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
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2049 since deposited on 2021-10-14
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Acq. date: 2026-01-06
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2049 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-01-06
Citations