Publication:

Issues, achievements and challenges towards integration of high-k dielectrics

Date

2002
Proceedings Paper
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Author(s)

Caymax, Matty  
;
De Gendt, Stefan  
;
Vandervorst, Wilfried  
;
Heyns, Marc  
;
Bender, Hugo  
;
Carter, Richard
;
Conard, Thierry  
;
Degraeve, Robin  
;
Groeseneken, Guido  
;
Kubicek, Stefan  
;
Lujan, Guilherme
;
Pantisano, Luigi
;
Petry, Jasmine
;
Röhr, Erika
;
Van Elshocht, Sven  
;
Zhao, Chao
;
Cartier, Eduard
;
Chen, Jerry
;
Cosnier, Vincent
;
Jang, Se Aug
;
Kaushik, Vidya
;
Kerber, Andreas
;
Kluth, Jon
;
Lin, S.
;
Tsai, Wilman
;
Young, Edward
;
Manabe, Y.

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2022 since deposited on 2021-10-14
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