Authors

Job, R.; Ulyashin, A.G.; Fahrner, W.R.; Niedernostheide, F.J.; Schulze, H. J.; Simoen, Eddy; Claeys, Cor; Tonelli, G.

Conference

Proceedings of the 11th International Workshop on Physics of Semiconductor Devices

Title

A low temperature technology on the base of hydrogen enhanced thermal donor formation for future high voltage applications

Publication type

Proceedings paper

Embargo date

9999-12-31