Elevated co-silicide for sub-100nm high performance and RF CMOS

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Authors
Jurczak, Gosia; de Potter de ten Broeck, Muriel; Rooyackers, Rita; Jeamsaksiri, Wutthinan; Redolfi, Augusto; Grau, Lluis; Lauwers, Anne; Lindsay, Richard; Peytier, Ivan; Augendre, Emmanuel; Badenes, Gonçal
Conference
ESSDERC - 32nd European Solid-State Device Research Conference
Title
Elevated co-silicide for sub-100nm high performance and RF CMOS
Publication type
Proceedings paper
Embargo date
9999-12-31
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