Authors

Kerber, Andreas; Cartier, Eduard; Degraeve, Robin; Roussel, Philippe; Pantisano, Luigi; Kauerauf, Thomas; Groeseneken, Guido; De Gendt, Stefan; Heyns, Marc

Conference

Workshop on Dielectrics in Insulators - WODIM

Title

Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

Publication type

Oral presentation