Publication:
Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
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2061 since deposited on 2021-10-14
Acq. date: 2025-10-23
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Views
2061 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations