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Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
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Authors
Lauwers, Anne
;
de Potter de ten Broeck, Muriel
;
Lindsay, Richard
;
Chamirian, Oxana
;
Demeurisse, Caroline
;
Vrancken, Christa
;
Maex, Karen
Conference
Silicon Materials - Processing, Characterization, and Reliability
Title
Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
Publication type
Proceedings paper
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