Authors

Murray, C.; Flannery, C.; Streiter, I.; Schulz, S. E.; Baklanov, Mikhaïl; Mogilnikov, K. P.; Himcinschi, C.; Friedrich, M.; Zahn, D. R. T.; Gessner, T.

Issue

1_2

Journal

Microelectronic Engineering

Volume

60

Title

Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films

Publication type

Journal article