Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
The impact of plasma-charging damage on the RF performance of deep-submicron MOSFET
Publication:
The impact of plasma-charging damage on the RF performance of deep-submicron MOSFET
Copy permalink
Date
2002
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantisano, Luigi
;
Cheung, K. P.
;
Roussel, Philippe
;
Paccagnella, A.
Journal
IEEE Electron Device Letters
Abstract
Description
Metrics
Views
1919
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1919
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations