Mobility reduction due to remote charge scattering in Al2O3/SiO2 gate-stacked MISFETs

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Authors
Saito, Shin-ichi; Shimamoto, Yasuhiro; Torii, Kazuyoshi; Manabe, Yukiko; Caymax, Matty; Maes, Jan; Hiratani, Masahiko; Kimura, Shin-ichiro
Conference
Extended Abstracts of the 2002 International Conference on Solid State Devices - SSDM
Title
Mobility reduction due to remote charge scattering in Al2O3/SiO2 gate-stacked MISFETs
Publication type
Proceedings paper
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