Publication:

Nucleation and growth of TiN films deposited by atomic layer deposition

Date

2002

Proceedings Paper

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Author(s)

Satta, Alessandra

;

Brongersma, Sywert

;

Schuhmacher, Jörg

;

Conard, Thierry

;

;

;

;

Brongersma, H.H.

;

;

;

;

Vantomme, Andre

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