Publication:

Nucleation and growth of TiN films deposited by atomic layer deposition

Date

2002
Proceedings Paper
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Author(s)

Satta, Alessandra
;
Brongersma, Sywert  
;
Schuhmacher, Jörg
;
Conard, Thierry  
;
Beyer, Gerald  
;
Maex, Karen  
;
Viitanen, M.M.
;
Brongersma, H.H.
;
Besling, W.
;
Kilpela, Olli
;
Sprey, Hessel  
;
Vantomme, Andre  

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