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Nucleation and growth of TiN films deposited by atomic layer deposition
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Authors
Satta, Alessandra
;
Brongersma, Sywert
;
Schuhmacher, Jörg
;
Conard, Thierry
;
Beyer, Gerald
;
Maex, Karen
;
Viitanen, M.M.
;
Brongersma, H.H.
;
Besling, W.
;
Kilpela, Olli
;
Sprey, Hessel
;
Vantomme, Andre
Conference
Proceedings of the 3rd AVS International Conference on Microelectronics and Interfaces
Title
Nucleation and growth of TiN films deposited by atomic layer deposition
Publication type
Proceedings paper
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