Laser annealing for ultra-shallow junction formation in advanced CMOS

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Authors
Surdeanu, Radu; Ponomarev, Youri; Cerutti, R.; Pawlak, Bartek; Nanver, L.K.; Hoflijk, Ilse; Stolk, Peter; Dachs, Charles; Verheijen, M.A.; Kaiser, M.; Hopstaken, M.J.P.; van Berkum, J.G.M.; Roozeboom, F.; Lindsay, Richard
Conference
Rapid Thermal And Other Short-Time Processing Technologies III
Title
Laser annealing for ultra-shallow junction formation in advanced CMOS
Publication type
Proceedings paper
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