Publication:
New slurry formulation for copper-CMP process in a damascene integration scheme
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1904 since deposited on 2021-10-14
4last month
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Acq. date: 2026-10-09
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Statistics
Views
1904 since deposited on 2021-10-14
4last month
2last week
Acq. date: 2026-10-09
Citations